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China debuts first e-beam lithography machine

Lithography systems – among the most sophisticated machines ever created  are crucial for the mass production of chips, though China remains in the very early stages of developing such tools domestically.China is set to deliver its first domestically developed e-beam lithography tool for commercial use, advancing its chipmaking capabilities and taking a step forward in the race for technological advancement. Named Xizhi after the famed ancient Chinese calligrapher Wang Xizhi, the new machine was developed by a quantum technology lab at Zhejiang University in Hangzhou. It uses a focused electron beam to “write” chip circuits onto silicon wafers. Is China catching up?

 

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